Test structure for characterizing low voltage coplanar EWOD system

Yifan Li; Yoshio Mita; Les Haworth; William Parkes; Masanori Kubota; Anthony Walton

doi:10.1109/TSM.2008.2010737

Test structure for characterizing low voltage coplanar EWOD system

Yifan Li, Yoshio Mita, Les Haworth, William Parkes, Masanori Kubota, Anthony Walton

Mechanical and Construction Engineering Department

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

Original language	English
Pages (from-to)	88-95
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	22
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2008.2010737
Publication status	Published - 3 Feb 2009

Keywords

Coplanar EWOD
Ta205
electrowetting-on-dielectric (EWOD)
lab-on-a-chip (LOC)
low voltage
microfluidics
test structure

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10.1109/TSM.2008.2010737

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title = "Test structure for characterizing low voltage coplanar EWOD system",

abstract = "This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.",

keywords = "Coplanar EWOD, Ta205, electrowetting-on-dielectric (EWOD), lab-on-a-chip (LOC), low voltage, microfluidics, test structure",

author = "Yifan Li and Yoshio Mita and Les Haworth and William Parkes and Masanori Kubota and Anthony Walton",

year = "2009",

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doi = "10.1109/TSM.2008.2010737",

language = "English",

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journal = "IEEE Transactions on Semiconductor Manufacturing",

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TY - JOUR

T1 - Test structure for characterizing low voltage coplanar EWOD system

AU - Li, Yifan

AU - Mita, Yoshio

AU - Haworth, Les

AU - Parkes, William

AU - Kubota, Masanori

AU - Walton, Anthony

PY - 2009/2/3

Y1 - 2009/2/3

N2 - This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

AB - This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

KW - Coplanar EWOD

KW - Ta205

KW - electrowetting-on-dielectric (EWOD)

KW - lab-on-a-chip (LOC)

KW - low voltage

KW - microfluidics

KW - test structure

U2 - 10.1109/TSM.2008.2010737

DO - 10.1109/TSM.2008.2010737

M3 - Article

SN - 0894-6507

VL - 22

SP - 88

EP - 95

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

IS - 1

ER -

Test structure for characterizing low voltage coplanar EWOD system

Abstract

Keywords

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