Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

Yifan Li; Yong Qing Fu; D. Winters; Brian Flynn; William Parkes; Douglas Brodie; Yufei Liu; Jonathan Terry; Les Haworth; Andrew Bunting; J. Stevenson; Stewart Smith; Logan Mackay; Pat Langridge-Smith; Adam Stokes; Anthony Walton

doi:10.1109/TSM.2012.2202770

Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

Yifan Li, Yong Qing Fu, D. Winters, Brian Flynn, William Parkes, Douglas Brodie, Yufei Liu, Jonathan Terry, Les Haworth, Andrew Bunting, J. Stevenson, Stewart Smith, Logan Mackay, Pat Langridge-Smith, Adam Stokes, Anthony Walton

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.

Original language	English
Pages (from-to)	323-330
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	25
Issue number	3
DOIs	https://doi.org/10.1109/TSM.2012.2202770
Publication status	Published - 2012

Keywords

Contact angle
electro-wetting on dielectric (EWOD)
integration
surface acoustic wave (SAW)
test structure

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10.1109/TSM.2012.2202770

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Li, Y., Fu, Y. Q., Winters, D., Flynn, B., Parkes, W., Brodie, D., Liu, Y., Terry, J., Haworth, L., Bunting, A., Stevenson, J., Smith, S., Mackay, L., Langridge-Smith, P., Stokes, A., & Walton, A. (2012). Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics. IEEE Transactions on Semiconductor Manufacturing, 25(3), 323-330. https://doi.org/10.1109/TSM.2012.2202770

@article{f9bfcaf4dc61488582cd11afbff4cb90,

title = "Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics",

abstract = "This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.",

keywords = "Contact angle, electro-wetting on dielectric (EWOD), integration, surface acoustic wave (SAW), test structure",

author = "Yifan Li and Fu, {Yong Qing} and D. Winters and Brian Flynn and William Parkes and Douglas Brodie and Yufei Liu and Jonathan Terry and Les Haworth and Andrew Bunting and J. Stevenson and Stewart Smith and Logan Mackay and Pat Langridge-Smith and Adam Stokes and Anthony Walton",

year = "2012",

doi = "10.1109/TSM.2012.2202770",

language = "English",

volume = "25",

pages = "323--330",

journal = "IEEE Transactions on Semiconductor Manufacturing",

issn = "0894-6507",

publisher = "IEEE",

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Li, Y , Fu, YQ, Winters, D, Flynn, B, Parkes, W, Brodie, D, Liu, Y, Terry, J, Haworth, L, Bunting, A, Stevenson, J, Smith, S, Mackay, L, Langridge-Smith, P, Stokes, A & Walton, A 2012, 'Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics', IEEE Transactions on Semiconductor Manufacturing, vol. 25, no. 3, pp. 323-330. https://doi.org/10.1109/TSM.2012.2202770

TY - JOUR

T1 - Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

AU - Li, Yifan

AU - Fu, Yong Qing

AU - Winters, D.

AU - Flynn, Brian

AU - Parkes, William

AU - Brodie, Douglas

AU - Liu, Yufei

AU - Terry, Jonathan

AU - Haworth, Les

AU - Bunting, Andrew

AU - Stevenson, J.

AU - Smith, Stewart

AU - Mackay, Logan

AU - Langridge-Smith, Pat

AU - Stokes, Adam

AU - Walton, Anthony

PY - 2012

Y1 - 2012

N2 - This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.

AB - This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.

KW - Contact angle

KW - electro-wetting on dielectric (EWOD)

KW - integration

KW - surface acoustic wave (SAW)

KW - test structure

U2 - 10.1109/TSM.2012.2202770

DO - 10.1109/TSM.2012.2202770

M3 - Article

SN - 0894-6507

VL - 25

SP - 323

EP - 330

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

IS - 3

ER -

Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

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Keywords

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