Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Anotidaishe Moyo*, Muhammad Wakil Shahzad, Jonathan G. Terry, Stewart Smith, Mita Yoshio, Yifan Li*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)
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Abstract

Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.
Original languageEnglish
Title of host publication2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023
Place of PublicationPiscataway, US
PublisherIEEE
Pages27-30
Number of pages4
ISBN (Electronic)9798350346534, 9798350346527
ISBN (Print)9798350346541
DOIs
Publication statusPublished - 27 Mar 2023

Publication series

NameInternational Conference on Microelectronic Test Structure (ICMTS)
PublisherIEEE
ISSN (Print)1071-9032
ISSN (Electronic)2158-1029

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