Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Anotidaishe Moyo; Muhammad Wakil Shahzad; Jonathan G. Terry; Stewart Smith; Mita Yoshio; Yifan Li

doi:10.1109/icmts55420.2023.10094057

Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Anotidaishe Moyo^*, Muhammad Wakil Shahzad, Jonathan G. Terry, Stewart Smith, Mita Yoshio, Yifan Li^*

^*Corresponding author for this work

Mechanical and Construction Engineering Department

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

29 Downloads (Pure)

Abstract

Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.

Original language	English
Title of host publication	2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023
Place of Publication	Piscataway, US
Publisher	IEEE
Pages	27-30
Number of pages	4
ISBN (Electronic)	9798350346534, 9798350346527
ISBN (Print)	9798350346541
DOIs	https://doi.org/10.1109/icmts55420.2023.10094057
Publication status	Published - 27 Mar 2023

Publication series

Name	International Conference on Microelectronic Test Structure (ICMTS)
Publisher	IEEE
ISSN (Print)	1071-9032
ISSN (Electronic)	2158-1029

Keywords

Electric Double layer
Energy Harvesting
Reverse-Electrowetting on Dielectric

Access to Document

10.1109/icmts55420.2023.10094057

ICMTS 2023 full paper submission 0220Accepted author manuscript, 390 KB

Cite this

Moyo, A., Shahzad, M. W., Terry, J. G., Smith, S., Yoshio, M., & Li, Y. (2023). Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting. In 2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023 (pp. 27-30). (International Conference on Microelectronic Test Structure (ICMTS)). IEEE. https://doi.org/10.1109/icmts55420.2023.10094057

Moyo, Anotidaishe ; Shahzad, Muhammad Wakil ; Terry, Jonathan G. et al. / Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting. 2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023. Piscataway, US : IEEE, 2023. pp. 27-30 (International Conference on Microelectronic Test Structure (ICMTS)).

@inproceedings{849488feab8448c089647d05c9ee26e4,

title = "Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting",

abstract = "Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.",

keywords = "Electric Double layer, Energy Harvesting, Reverse-Electrowetting on Dielectric",

author = "Anotidaishe Moyo and Shahzad, {Muhammad Wakil} and Terry, {Jonathan G.} and Stewart Smith and Mita Yoshio and Yifan Li",

note = "Funding Information: We acknowledge Dr Camelia Dunare and Mr Stewart Ramsay, who fabricated the test structures in the cleanroom facilities of the Scottish Microelectronics Centre, at the University of Edinburgh. The authors would like to thank MEMSstar Ltd, who provided access to their aFP hydrophobic coating AURIXTM system. The authors would also like to thank the financial support from EPSRC ReNU Centre for Doctoral Training (CDT) fund (EP/S023836/1).",

year = "2023",

month = mar,

day = "27",

doi = "10.1109/icmts55420.2023.10094057",

language = "English",

isbn = "9798350346541",

series = "International Conference on Microelectronic Test Structure (ICMTS)",

publisher = "IEEE",

pages = "27--30",

booktitle = "2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023",

address = "United States",

}

Moyo, A , Shahzad, MW, Terry, JG, Smith, S, Yoshio, M & Li, Y 2023, Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting. in 2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023. International Conference on Microelectronic Test Structure (ICMTS), IEEE, Piscataway, US, pp. 27-30. https://doi.org/10.1109/icmts55420.2023.10094057

Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting. / Moyo, Anotidaishe ; Shahzad, Muhammad Wakil; Terry, Jonathan G. et al.
2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023. Piscataway, US: IEEE, 2023. p. 27-30 (International Conference on Microelectronic Test Structure (ICMTS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

AU - Moyo, Anotidaishe

AU - Shahzad, Muhammad Wakil

AU - Terry, Jonathan G.

AU - Smith, Stewart

AU - Yoshio, Mita

AU - Li, Yifan

N1 - Funding Information: We acknowledge Dr Camelia Dunare and Mr Stewart Ramsay, who fabricated the test structures in the cleanroom facilities of the Scottish Microelectronics Centre, at the University of Edinburgh. The authors would like to thank MEMSstar Ltd, who provided access to their aFP hydrophobic coating AURIXTM system. The authors would also like to thank the financial support from EPSRC ReNU Centre for Doctoral Training (CDT) fund (EP/S023836/1).

PY - 2023/3/27

Y1 - 2023/3/27

N2 - Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.

AB - Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.

KW - Electric Double layer

KW - Energy Harvesting

KW - Reverse-Electrowetting on Dielectric

UR - http://www.scopus.com/inward/record.url?scp=85153565272&partnerID=8YFLogxK

U2 - 10.1109/icmts55420.2023.10094057

DO - 10.1109/icmts55420.2023.10094057

M3 - Conference contribution

SN - 9798350346541

T3 - International Conference on Microelectronic Test Structure (ICMTS)

SP - 27

EP - 30

BT - 2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023

PB - IEEE

CY - Piscataway, US

ER -

Moyo A , Shahzad MW, Terry JG, Smith S, Yoshio M, Li Y. Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting. In 2023 35th International Conference on Microelectronic Test Structure, ICMTS 2023. Piscataway, US: IEEE. 2023. p. 27-30. (International Conference on Microelectronic Test Structure (ICMTS)). doi: 10.1109/icmts55420.2023.10094057

Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Abstract

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Keywords

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