The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Andrew Gallant, David Wood

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.
Original languageEnglish
Pages (from-to)423-431
Number of pages9
JournalSensors and actuators A : physical.
Volume110
Issue number1-3
DOIs
Publication statusPublished - 1 Feb 2004

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