The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Andrew Gallant, David Wood

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Fingerprint

Dive into the research topics of 'The role of fabrication techniques on the performance of widely tunable micromachined capacitors'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds