Thermal deflections in multilayer microstructures and athermalization

Engineering

• Substrates 100%
• Thickness Ratio 100%
• Layer Structure 100%
• Simulation 50%
• Deflection 50%
• Experiments 50%
• Microstructure 50%
• Induced Deformation 50%
• Microelectromechanical System 50%
• Performance Trade 50%
• Finite Element Modeling 50%
• Closed Form Solution 50%
• Silicon 50%
• Multilayer Film 50%
• Multilayers 50%
• Flexure 50%
• Aluminum 50%