Thermo-mechanical detector array with optical readout

H. Torun*, O. Ferhanoglu, H. Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE
Pages112-113
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
Publication statusPublished - 9 Oct 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 21 Aug 200624 Aug 2006

Publication series

NameOptical MEMS and Their Applications
PublisherIEEE
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period21/08/0624/08/06

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