@inproceedings{03457e5912f246c1aebb96f0abf1d1a2,
title = "Thermo-mechanical detector array with optical readout",
abstract = "An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.",
keywords = "Optical arrays, Thermomechanical processes, Optical detectors, Sensor arrays, Optical interferometry, Optical noise, Optical diffraction, Diffraction gratings, Silicon compounds, Optical sensors",
author = "H. Torun and O. Ferhanoglu and H. Urey",
year = "2006",
month = oct,
day = "9",
doi = "10.1109/OMEMS.2006.1708290",
language = "English",
isbn = "078039562X",
series = "Optical MEMS and Their Applications",
publisher = "IEEE",
pages = "112--113",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
address = "United States",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}