Thermo-mechanical detector array with optical readout

H. Torun; O. Ferhanoglu; H. Urey

doi:10.1109/OMEMS.2006.1708290

Thermo-mechanical detector array with optical readout

H. Torun^*, O. Ferhanoglu, H. Urey

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Publisher	IEEE
Pages	112-113
Number of pages	2
ISBN (Print)	078039562X, 9780780395626
DOIs	https://doi.org/10.1109/OMEMS.2006.1708290
Publication status	Published - 9 Oct 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 21 Aug 2006 → 24 Aug 2006

Publication series

Name	Optical MEMS and Their Applications
Publisher	IEEE
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	21/08/06 → 24/08/06

Keywords

Optical arrays
Thermomechanical processes
Optical detectors
Sensor arrays
Optical interferometry
Optical noise
Optical diffraction
Diffraction gratings
Silicon compounds
Optical sensors

Access to Document

10.1109/OMEMS.2006.1708290

Cite this

@inproceedings{03457e5912f246c1aebb96f0abf1d1a2,

title = "Thermo-mechanical detector array with optical readout",

abstract = "An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.",

keywords = "Optical arrays, Thermomechanical processes, Optical detectors, Sensor arrays, Optical interferometry, Optical noise, Optical diffraction, Diffraction gratings, Silicon compounds, Optical sensors",

author = "H. Torun and O. Ferhanoglu and H. Urey",

year = "2006",

month = oct,

day = "9",

doi = "10.1109/OMEMS.2006.1708290",

language = "English",

isbn = "078039562X",

series = "Optical MEMS and Their Applications",

publisher = "IEEE",

pages = "112--113",

booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",

}

Torun, H, Ferhanoglu, O & Urey, H 2006, Thermo-mechanical detector array with optical readout. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708290, Optical MEMS and Their Applications, IEEE, pp. 112-113, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 21/08/06. https://doi.org/10.1109/OMEMS.2006.1708290

TY - GEN

T1 - Thermo-mechanical detector array with optical readout

AU - Torun, H.

AU - Ferhanoglu, O.

AU - Urey, H.

PY - 2006/10/9

Y1 - 2006/10/9

N2 - An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.

AB - An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.

KW - Optical arrays

KW - Thermomechanical processes

KW - Optical detectors

KW - Sensor arrays

KW - Optical interferometry

KW - Optical noise

KW - Optical diffraction

KW - Diffraction gratings

KW - Silicon compounds

KW - Optical sensors

UR - https://www.scopus.com/pages/publications/41549101698

U2 - 10.1109/OMEMS.2006.1708290

DO - 10.1109/OMEMS.2006.1708290

M3 - Conference contribution

AN - SCOPUS:41549101698

SN - 078039562X

SN - 9780780395626

T3 - Optical MEMS and Their Applications

SP - 112

EP - 113

BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

PB - IEEE

T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Y2 - 21 August 2006 through 24 August 2006

ER -

Thermo-mechanical detector array with optical readout

Abstract

Publication series

Conference

Keywords

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