TY - JOUR
T1 - Thin film flexible/bendable acoustic wave devices
T2 - evolution, hybridization and decoupling of multiple acoustic wave modes
AU - Tao, Ran
AU - Wang, W. B.
AU - Luo, Jingting
AU - Ahmad Hasan, Sameer
AU - Torun, Hamdi
AU - Canyelles-Pericas, Pep
AU - Zhou, Jian
AU - Xuan, W. P.
AU - Cooke, Michael
AU - Gibson, Debra
AU - Wu, Qiang
AU - Ng, Wai Pang
AU - Luo, J. K.
AU - Fu, Richard
PY - 2019/1/15
Y1 - 2019/1/15
N2 - Based on theoretical analysis, finite element simulation and experimental verifications, we have systematically investigated evolution, hybridization and decoupling of multiple acoustic wave modes and vibration patterns generated from piezoelectric film acoustic wave devices fabricated on flexible thin foils/plates. ZnO piezoelectric films deposited on flexible and bendable Al foil and plates were selected for this particular study. The ZnO/Al acoustic wave devices were chosen with wavelengths varied from 12 to 800 µm, ZnO film thickness from 2 to 10 µm and Al foil/plate thickness from 10 to 600 µm. Multiple acoustic wave modes (including symmetrical and asymmetrical Lamb waves, Rayleigh waves and higher harmonic/Sezawa wave modes) were generated, hybridized occasionally with each other, and then easily decoupled by changing the ratios of the substrate/film thicknesses to wavelengths. Ratios between device wavelength and substrate/film thickness have been identified to be the dominant parameter in determining the evolution and hybridization of multiple wave modes and their vibration patterns, which provide useful design guidance for both sensing and microfluidic applications using these flexible and bendable acoustic wave devices.
AB - Based on theoretical analysis, finite element simulation and experimental verifications, we have systematically investigated evolution, hybridization and decoupling of multiple acoustic wave modes and vibration patterns generated from piezoelectric film acoustic wave devices fabricated on flexible thin foils/plates. ZnO piezoelectric films deposited on flexible and bendable Al foil and plates were selected for this particular study. The ZnO/Al acoustic wave devices were chosen with wavelengths varied from 12 to 800 µm, ZnO film thickness from 2 to 10 µm and Al foil/plate thickness from 10 to 600 µm. Multiple acoustic wave modes (including symmetrical and asymmetrical Lamb waves, Rayleigh waves and higher harmonic/Sezawa wave modes) were generated, hybridized occasionally with each other, and then easily decoupled by changing the ratios of the substrate/film thicknesses to wavelengths. Ratios between device wavelength and substrate/film thickness have been identified to be the dominant parameter in determining the evolution and hybridization of multiple wave modes and their vibration patterns, which provide useful design guidance for both sensing and microfluidic applications using these flexible and bendable acoustic wave devices.
KW - Acoustic waves
KW - Surface acoustic wave
KW - Lamb wave
KW - Flexible devices ZnO
KW - thin films
U2 - 10.1016/j.surfcoat.2018.10.042
DO - 10.1016/j.surfcoat.2018.10.042
M3 - Article
SN - 0257-8972
VL - 357
SP - 587
EP - 594
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -