Thin film shape memory alloys for optical sensing applications

Y. Q. Fu*, J. K. Luo, W. M. Huang, A. J. Flewitt, W. I. Milne

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si3N4microcantilever mirror structures were fabricated.

Original languageEnglish
Article number012032
JournalJournal of Physics: Conference Series
Volume76
Issue number1
DOIs
Publication statusPublished - 1 Sep 2007
Externally publishedYes

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