Thin film shape memory alloys for optical sensing applications

Y. Q. Fu; J. K. Luo; W. M. Huang; A. J. Flewitt; W. I. Milne

doi:10.1088/1742-6596/76/1/012032

Thin film shape memory alloys for optical sensing applications

Y. Q. Fu^*, J. K. Luo, W. M. Huang, A. J. Flewitt, W. I. Milne

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si₃N₄microcantilever mirror structures were fabricated.

Original language	English
Article number	012032
Journal	Journal of Physics: Conference Series
Volume	76
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/76/1/012032
Publication status	Published - 1 Sept 2007
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Film
Micromirror
Shape memory
Sputtering
TiNi

Access to Document

10.1088/1742-6596/76/1/012032

Cite this

@article{c7451d93aa874f91a317a707888726a5,

title = "Thin film shape memory alloys for optical sensing applications",

abstract = "Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si3N4microcantilever mirror structures were fabricated.",

keywords = "Film, Micromirror, Shape memory, Sputtering, TiNi",

author = "Fu, \{Y. Q.\} and Luo, \{J. K.\} and Huang, \{W. M.\} and Flewitt, \{A. J.\} and Milne, \{W. I.\}",

year = "2007",

month = sep,

day = "1",

doi = "10.1088/1742-6596/76/1/012032",

language = "English",

volume = "76",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "1",

}

TY - JOUR

T1 - Thin film shape memory alloys for optical sensing applications

AU - Fu, Y. Q.

AU - Luo, J. K.

AU - Huang, W. M.

AU - Flewitt, A. J.

AU - Milne, W. I.

PY - 2007/9/1

Y1 - 2007/9/1

N2 - Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si3N4microcantilever mirror structures were fabricated.

AB - Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si3N4microcantilever mirror structures were fabricated.

KW - Film

KW - Micromirror

KW - Shape memory

KW - Sputtering

KW - TiNi

UR - https://www.scopus.com/pages/publications/34547665219

U2 - 10.1088/1742-6596/76/1/012032

DO - 10.1088/1742-6596/76/1/012032

M3 - Article

AN - SCOPUS:34547665219

SN - 1742-6588

VL - 76

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012032

ER -

Thin film shape memory alloys for optical sensing applications

Abstract

UN SDGs

Keywords

Access to Document

Other files and links

Fingerprint

Cite this