Transparent Conducting Gallium-Doped Zinc Oxide Thin Films on Glass Substrate for Optoelectronic Device Applications

Himadri Sekhar Das*, Santanu Mishra, Mrinal Kanti Dash, Prasanta Kumar Nandi, Subir Kumar Maity, Debnarayan Khatua, Anindita Chatterjee, Zhanhu Guo, Ben Bin Xu, Gourisankar Roymahapatra

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Gallium (Ga)-doped zinc oxide (GZO) thin film is a promising alternative anode material to indium doped tin oxide (ITO) in organic light-emitting diode (OLED) applications. In this paper, ZnO:Ga transparent conducting oxide (TCO) thin films were deposited on glass substrates by radio frequency (RF) magnetron sputtering techniques. Variations of electrical, optical, and structural properties of GZO films with different substrate temperatures were investigated. Among different substrate temperatures, 200 ºC substrate temperature deposited film shows the lowest resistivity 2.45×10-4 Ω cm with an optical transmission of more than 90 %. Finally, GZO thin film was used as an anode material in OLED devices and was also compared with the ITO anode-based OLED. The obtained GZO-based OLED shows similar performance compared with ITO-based OLED devices.

Original languageEnglish
Article number841
Pages (from-to)1-7
Number of pages7
JournalES Materials and Manufacturing
Publication statusPublished - 15 Mar 2023

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