Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode

Jian Zhou; Xuezhong Wu; Dingbang Xiao; Hao Jin; Shurong Dong; Yong Qing Fu; Jikui Luo

doi:10.1109/MEMSYS.2017.7863502

Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode

Jian Zhou, Xuezhong Wu, Dingbang Xiao, Hao Jin, Shurong Dong, Yong Qing Fu, Jikui Luo

Research output: Chapter in Book/Report/Conference proceeding › Chapter

1 Citation (Scopus)

Abstract

This paper reports the fabrication of transparent SAW resonators using AZO as the transparent electrodes. Transparent SAW resonators exhibited two types of wave modes: Rayleigh and Sezawa waves, and signal amplitudes up to 25 dB were obtained with the transparency above 80%. The series resistance effect of the AZO film electrode on the performance of transparent SAW devices have been systematically investigated and results show that the series resistance should be lower than 10 Ω/sq. Temperature sensing showed the transparent SAW device has a temperature coefficient of frequency of ~45 ppm/K. The transparent devices have also demonstrated their ability to induce a strong acoustic streaming with a streaming velocity up to 2.27 cm/s. This research opened a door for further exploration of the SAW devices in transparent electronics such as transparent microfluidics and sensors.

Original language	English
Title of host publication	Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on
Place of Publication	Piscataway
Publisher	IEEE
ISBN (Print)	978-1-5090-5079-6
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863502
Publication status	Published - 28 Feb 2017

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title = "Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode",

abstract = "This paper reports the fabrication of transparent SAW resonators using AZO as the transparent electrodes. Transparent SAW resonators exhibited two types of wave modes: Rayleigh and Sezawa waves, and signal amplitudes up to 25 dB were obtained with the transparency above 80\%. The series resistance effect of the AZO film electrode on the performance of transparent SAW devices have been systematically investigated and results show that the series resistance should be lower than 10 Ω/sq. Temperature sensing showed the transparent SAW device has a temperature coefficient of frequency of \textasciitilde{}45 ppm/K. The transparent devices have also demonstrated their ability to induce a strong acoustic streaming with a streaming velocity up to 2.27 cm/s. This research opened a door for further exploration of the SAW devices in transparent electronics such as transparent microfluidics and sensors.",

author = "Jian Zhou and Xuezhong Wu and Dingbang Xiao and Hao Jin and Shurong Dong and Fu, \{Yong Qing\} and Jikui Luo",

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doi = "10.1109/MEMSYS.2017.7863502",

language = "English",

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TY - CHAP

T1 - Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode

AU - Zhou, Jian

AU - Wu, Xuezhong

AU - Xiao, Dingbang

AU - Jin, Hao

AU - Dong, Shurong

AU - Fu, Yong Qing

AU - Luo, Jikui

PY - 2017/2/28

Y1 - 2017/2/28

N2 - This paper reports the fabrication of transparent SAW resonators using AZO as the transparent electrodes. Transparent SAW resonators exhibited two types of wave modes: Rayleigh and Sezawa waves, and signal amplitudes up to 25 dB were obtained with the transparency above 80%. The series resistance effect of the AZO film electrode on the performance of transparent SAW devices have been systematically investigated and results show that the series resistance should be lower than 10 Ω/sq. Temperature sensing showed the transparent SAW device has a temperature coefficient of frequency of ~45 ppm/K. The transparent devices have also demonstrated their ability to induce a strong acoustic streaming with a streaming velocity up to 2.27 cm/s. This research opened a door for further exploration of the SAW devices in transparent electronics such as transparent microfluidics and sensors.

AB - This paper reports the fabrication of transparent SAW resonators using AZO as the transparent electrodes. Transparent SAW resonators exhibited two types of wave modes: Rayleigh and Sezawa waves, and signal amplitudes up to 25 dB were obtained with the transparency above 80%. The series resistance effect of the AZO film electrode on the performance of transparent SAW devices have been systematically investigated and results show that the series resistance should be lower than 10 Ω/sq. Temperature sensing showed the transparent SAW device has a temperature coefficient of frequency of ~45 ppm/K. The transparent devices have also demonstrated their ability to induce a strong acoustic streaming with a streaming velocity up to 2.27 cm/s. This research opened a door for further exploration of the SAW devices in transparent electronics such as transparent microfluidics and sensors.

UR - https://www.scopus.com/pages/publications/85015793565

U2 - 10.1109/MEMSYS.2017.7863502

DO - 10.1109/MEMSYS.2017.7863502

M3 - Chapter

SN - 978-1-5090-5079-6

BT - Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on

PB - IEEE

CY - Piscataway

ER -

Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode

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