Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1016/j.sna.2009.02.010

Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

Original language	English
Pages (from-to)	88-94
Journal	Sensors and Actuators, A: Physical
Volume	156
Issue number	1
Early online date	28 Feb 2009
DOIs	https://doi.org/10.1016/j.sna.2009.02.010
Publication status	Published - Nov 2009
Externally published	Yes

Keywords

Thermal detector
NETD
Optical readout
Diffraction grating
CCD camera

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10.1016/j.sna.2009.02.010

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abstract = "Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.",

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AB - Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

KW - Thermal detector

KW - NETD

KW - Optical readout

KW - Diffraction grating

KW - CCD camera

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Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Abstract

Keywords

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