Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)


Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.
Original languageEnglish
Pages (from-to)88-94
JournalSensors and Actuators, A: Physical
Issue number1
Early online date28 Feb 2009
Publication statusPublished - Nov 2009
Externally publishedYes


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