Abstract
Existing problems in the development of vertical-cavity surface-emitting lasers with photonic crystals (PC-VCSELs) for transverse mode control are reviewed. The theoretical background of VCSELs with PCs incorporated within their top distributed Bragg reflector (DBR) (type I PC-VCSELs) and VCSELs with PCs incorporated within their cavity (type II PC-VCSELs) is introduced. Their fabrication using focused ion-beam (FIB) etching is discussed. It is shown that type I single-mode PC-VCSELs suffer from low optical power and poor small-signal modulation performance due to the reduction of the reflectivity of the top DBR introduced by the PC. The problem is expected to be reduced in type II PC-VCSELs that are being investigated now. One approach to the fabrication of type II PC-VCSELs is described.
Original language | English |
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Article number | 094010 |
Number of pages | 11 |
Journal | Semiconductor Science and Technology |
Volume | 27 |
Issue number | 9 |
Early online date | 22 Aug 2012 |
DOIs | |
Publication status | Published - 1 Sept 2012 |
Externally published | Yes |