Wireless driven EWOD technology for a MEMS pond skater

Yoshio Mita; Yifan Li; Masanori Kubota; William Parkes; Les Haworth; Brian Flynn; Jonathan Terry; T. Tang; Alec Ruthven; Stewart Smith

doi:10.1109/ESSDERC.2008.4681759

Wireless driven EWOD technology for a MEMS pond skater

Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Les Haworth, Brian Flynn, Jonathan Terry, T. Tang, Alec Ruthven, Stewart Smith

Mechanical and Construction Engineering Department

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

5 Citations (Scopus)

Abstract

A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent ejection using a recently reported Ta2O5 EWOD technology. The required driving voltage of ~15 V is low enough for RF power transmission, thus providing wire-free movement. A wired version has been measured to move 1.35 mm in 168 ms (a speed of 8 mm s-1). This low-voltage EWOD device, fabricated using a CMOS compatible process, is believed to be the worldpsilas smallest swimming MEMS device that has no mechanical moving parts. The paper also reports results of EWOD droplet operation driven by wireless power transmission and demonstrates that such a wireless design can be successfully mounted on a floating EWOD device.

Original language	English
Title of host publication	38th European Solid-State Device Research Conference, 2008. ESSDERC 2008.
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	306-309
ISBN (Print)	978-1-4244-2363-7
DOIs	https://doi.org/10.1109/ESSDERC.2008.4681759
Publication status	Published - 2008
Event	ESSDERC 2008: 38th European Solid-State Device Research Conference - Duration: 1 Jan 2008 → …

Conference

Conference	ESSDERC 2008: 38th European Solid-State Device Research Conference
Period	1/01/08 → …

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10.1109/ESSDERC.2008.4681759

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@inbook{573780fa58ea46ac946821f22af5aac3,

title = "Wireless driven EWOD technology for a MEMS pond skater",

abstract = "A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent ejection using a recently reported Ta2O5 EWOD technology. The required driving voltage of ~15 V is low enough for RF power transmission, thus providing wire-free movement. A wired version has been measured to move 1.35 mm in 168 ms (a speed of 8 mm s-1). This low-voltage EWOD device, fabricated using a CMOS compatible process, is believed to be the worldpsilas smallest swimming MEMS device that has no mechanical moving parts. The paper also reports results of EWOD droplet operation driven by wireless power transmission and demonstrates that such a wireless design can be successfully mounted on a floating EWOD device.",

author = "Yoshio Mita and Yifan Li and Masanori Kubota and William Parkes and Les Haworth and Brian Flynn and Jonathan Terry and T. Tang and Alec Ruthven and Stewart Smith",

note = "This paper was presented at the 38th European Solid-State Device Research Conference, 15-19 Sept. 2008. Edinburgh.; ESSDERC 2008: 38th European Solid-State Device Research Conference ; Conference date: 01-01-2008",

year = "2008",

doi = "10.1109/ESSDERC.2008.4681759",

language = "English",

isbn = "978-1-4244-2363-7",

pages = "306--309",

booktitle = "38th European Solid-State Device Research Conference, 2008. ESSDERC 2008.",

publisher = "IEEE",

address = "United States",

}

Mita, Y, Li, Y, Kubota, M, Parkes, W, Haworth, L, Flynn, B, Terry, J, Tang, T, Ruthven, A & Smith, S 2008, Wireless driven EWOD technology for a MEMS pond skater. in 38th European Solid-State Device Research Conference, 2008. ESSDERC 2008.. IEEE, Piscataway, NJ, pp. 306-309, ESSDERC 2008: 38th European Solid-State Device Research Conference, 1/01/08. https://doi.org/10.1109/ESSDERC.2008.4681759

TY - CHAP

T1 - Wireless driven EWOD technology for a MEMS pond skater

AU - Mita, Yoshio

AU - Li, Yifan

AU - Kubota, Masanori

AU - Parkes, William

AU - Haworth, Les

AU - Flynn, Brian

AU - Terry, Jonathan

AU - Tang, T.

AU - Ruthven, Alec

AU - Smith, Stewart

N1 - This paper was presented at the 38th European Solid-State Device Research Conference, 15-19 Sept. 2008. Edinburgh.

PY - 2008

Y1 - 2008

N2 - A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent ejection using a recently reported Ta2O5 EWOD technology. The required driving voltage of ~15 V is low enough for RF power transmission, thus providing wire-free movement. A wired version has been measured to move 1.35 mm in 168 ms (a speed of 8 mm s-1). This low-voltage EWOD device, fabricated using a CMOS compatible process, is believed to be the worldpsilas smallest swimming MEMS device that has no mechanical moving parts. The paper also reports results of EWOD droplet operation driven by wireless power transmission and demonstrates that such a wireless design can be successfully mounted on a floating EWOD device.

AB - A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent ejection using a recently reported Ta2O5 EWOD technology. The required driving voltage of ~15 V is low enough for RF power transmission, thus providing wire-free movement. A wired version has been measured to move 1.35 mm in 168 ms (a speed of 8 mm s-1). This low-voltage EWOD device, fabricated using a CMOS compatible process, is believed to be the worldpsilas smallest swimming MEMS device that has no mechanical moving parts. The paper also reports results of EWOD droplet operation driven by wireless power transmission and demonstrates that such a wireless design can be successfully mounted on a floating EWOD device.

U2 - 10.1109/ESSDERC.2008.4681759

DO - 10.1109/ESSDERC.2008.4681759

M3 - Chapter

SN - 978-1-4244-2363-7

SP - 306

EP - 309

BT - 38th European Solid-State Device Research Conference, 2008. ESSDERC 2008.

PB - IEEE

CY - Piscataway, NJ

T2 - ESSDERC 2008: 38th European Solid-State Device Research Conference

Y2 - 1 January 2008

ER -

Wireless driven EWOD technology for a MEMS pond skater

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