Wireless driven EWOD technology for a MEMS pond skater

Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Les Haworth, Brian Flynn, Jonathan Terry, T. Tang, Alec Ruthven, Stewart Smith

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

5 Citations (Scopus)

Abstract

A silicon swimming robot or pond skating device has been demonstrated. It floats on liquid surfaces using surface tension and is capable of movement using electrowetting on dielectric (EWOD) based propulsion. Its dimensions are 6 times 9 mm with a thickness of 380 mum. The driving mechanism involves the trapping of air bubbles within the liquid onto the hydrophobic surface of the device with the subsequent ejection using a recently reported Ta2O5 EWOD technology. The required driving voltage of ~15 V is low enough for RF power transmission, thus providing wire-free movement. A wired version has been measured to move 1.35 mm in 168 ms (a speed of 8 mm s-1). This low-voltage EWOD device, fabricated using a CMOS compatible process, is believed to be the worldpsilas smallest swimming MEMS device that has no mechanical moving parts. The paper also reports results of EWOD droplet operation driven by wireless power transmission and demonstrates that such a wireless design can be successfully mounted on a floating EWOD device.
Original languageEnglish
Title of host publication38th European Solid-State Device Research Conference, 2008. ESSDERC 2008.
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages306-309
ISBN (Print)978-1-4244-2363-7
DOIs
Publication statusPublished - 2008
EventESSDERC 2008: 38th European Solid-State Device Research Conference -
Duration: 1 Jan 2008 → …

Conference

ConferenceESSDERC 2008: 38th European Solid-State Device Research Conference
Period1/01/08 → …

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