ZnO-Al2O3 nanocomposite as a sensitive layer for high performance surface acoustic wave H2S gas sensor with enhanced elastic loading effect

Yongliang Tang, Xiaofeng Xu, Shaobo Han, Chao Cai, Huarong Du, Hao Zhu, Xiaotao Zu, Yongqing Fu

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Abstract

ZnO-Al2O3 nanocomposite was synthesized and developed as a high performance sensitive and selective layer for surface acoustic wave (SAW) sensor, aiming for in-situ detection of H2S gas in ppb level operated at room temperature. ZnO-Al2O3 nanocomposite, synthesized though a sol-gel method, was spin-coated onto a quartz based SAW resonator. This composite layer inherits the mesoporous structure of the Al2O3 layer and good affinity to H2S gas molecules of the ZnO layer, and thus can selectively adsorb and react with H2S gas molecules to form ZnS compounds on its surface. This reaction leads to significant decreases of both pore sizes and total pore volume of the layer, an increase of layer’s elastic modulus, thus causing a large positive shift of the frequency responses of the SAW sensor. The sensor operated at room temperature shows a frequency response of ∼500 Hz to 10 ppb H2S, with an excellent selectivity and good recovery property.
Original languageEnglish
Article number127395
Number of pages10
JournalSensors and Actuators B: Chemical
Volume304
Early online date8 Nov 2019
DOIs
Publication statusPublished - 1 Feb 2020

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