TY - JOUR
T1 - ZnO based SAW and FBAR devices for bio-sensing applications
AU - Flewitt, Andrew
AU - Luo, Jikui
AU - Fu, Yong Qing
AU - Garcia-Gancedo, Luis
AU - Du, X.Y.
AU - Lu, J. R.
AU - Zhao, X. B.
AU - Iborra, Enrique
AU - Ramos, M.
AU - Milne, William
PY - 2015
Y1 - 2015
N2 - ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films were initially produced using a standard RF sputtering technique. However in order to produce lower stress, smoother films at low temperatures, a novel High Target Utilisation Sputtering (HiTUS) system has also been utilised. The ZnO acoustic devices have been used to move, mix, pump, eject and atomise liquids depending upon the amplitude of the signal and the condition of the surface. Such Surface Acoustic Wave (SAW) devices have also been shown to act as bio sensors but more sensitive detection is obtainable by the use of Film Bulk Acoustic Resonators (FBARs), the design and operation of which are described at the end of this review. Whilst the interaction of the acoustic wave with a fluid on its surface allows its rheological properties to be measured, such as viscosity, it is speculated that the combination of SAW and FBAR technologies may also provide new opportunities for rheometry on the microscale where fluids generally follow a non-Newtonian behaviour.
AB - ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films were initially produced using a standard RF sputtering technique. However in order to produce lower stress, smoother films at low temperatures, a novel High Target Utilisation Sputtering (HiTUS) system has also been utilised. The ZnO acoustic devices have been used to move, mix, pump, eject and atomise liquids depending upon the amplitude of the signal and the condition of the surface. Such Surface Acoustic Wave (SAW) devices have also been shown to act as bio sensors but more sensitive detection is obtainable by the use of Film Bulk Acoustic Resonators (FBARs), the design and operation of which are described at the end of this review. Whilst the interaction of the acoustic wave with a fluid on its surface allows its rheological properties to be measured, such as viscosity, it is speculated that the combination of SAW and FBAR technologies may also provide new opportunities for rheometry on the microscale where fluids generally follow a non-Newtonian behaviour.
KW - surface acoustic waves
KW - FBARs
KW - Bio sensors
U2 - 10.1016/j.jnnfm.2014.12.002
DO - 10.1016/j.jnnfm.2014.12.002
M3 - Article
SN - 0377-0257
VL - 222
SP - 209
EP - 216
JO - Journal of Non-Newtonian Fluid Mechanics
JF - Journal of Non-Newtonian Fluid Mechanics
ER -