ZnO based SAW and FBAR devices for lab-on-a chip applications

W. I. Milne*, Y. Q. Fu, Luis Garcia-Gancedo, Greg Ashley, J. K. Luo, P. B. Kirby, X. Zhao, J. R. Lu, A. J. Flewitt

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf magnetronand a novel High Target Utilisation (HiTUS) Sputtering System. Our results demonstrated the feasibility of using a single SAW-based actuation mechanism for both microfluidics and sensing. To further improve the sensitivity of our bio-sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators.

Original languageEnglish
Title of host publicationSociety for Information Display - 18th International Display Workshops 2011, IDW'11
Pages1149-1152
Number of pages4
Publication statusPublished - 1 Dec 2011
Externally publishedYes
Event18th International Display Workshops 2011, IDW 2011 - Nagoya, Japan
Duration: 7 Dec 20119 Dec 2011

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference18th International Display Workshops 2011, IDW 2011
CountryJapan
CityNagoya
Period7/12/119/12/11

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