ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

X.Y. Du; Yong Qing Fu; S. C. Tan; Jikui Luo; Andrew Flewitt; William Milne; Dae-Sik Lee; Nae-Man Park; J. Park; Youngjin Choi; Sang Hyeob Kim; Sunglyul Maeng

doi:10.1063/1.2970960

ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

X.Y. Du, Yong Qing Fu, S. C. Tan, Jikui Luo, Andrew Flewitt, William Milne, Dae-Sik Lee, Nae-Man Park, J. Park, Youngjin Choi, Sang Hyeob Kim, Sunglyul Maeng

Research output: Contribution to journal › Article › peer-review

120 Citations (Scopus)

Abstract

Surface acoustic wave(SAW) devices were fabricated on ZnO thin films deposited on Si substrates. Effects of ZnOfilm thickness on the wave mode and resonant frequency of the SAWs have been investigated. Rayleigh and Sezawa waves were detected, and their resonant frequencies decrease with increase in film thickness. The Sezawa wave has much higher acoustic velocity and larger signal amplitude than those of Rayleigh mode wave.Acoustic streaming for mixing has been realized in piezoelectric thin filmSAWs. The Sezawa wave has a much better efficiency in streaming, and thus is very promising for application in microfluidics.

Original language	English
Pages (from-to)	094105
Journal	Applied Physics Letters
Volume	93
Issue number	9
DOIs	https://doi.org/10.1063/1.2970960
Publication status	Published - 2008

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title = "ZnO film thickness effect on surface acoustic wave modes and acoustic streaming",

abstract = "Surface acoustic wave(SAW) devices were fabricated on ZnO thin films deposited on Si substrates. Effects of ZnOfilm thickness on the wave mode and resonant frequency of the SAWs have been investigated. Rayleigh and Sezawa waves were detected, and their resonant frequencies decrease with increase in film thickness. The Sezawa wave has much higher acoustic velocity and larger signal amplitude than those of Rayleigh mode wave.Acoustic streaming for mixing has been realized in piezoelectric thin filmSAWs. The Sezawa wave has a much better efficiency in streaming, and thus is very promising for application in microfluidics.",

author = "X.Y. Du and Fu, \{Yong Qing\} and Tan, \{S. C.\} and Jikui Luo and Andrew Flewitt and William Milne and Dae-Sik Lee and Nae-Man Park and J. Park and Youngjin Choi and Kim, \{Sang Hyeob\} and Sunglyul Maeng",

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doi = "10.1063/1.2970960",

language = "English",

volume = "93",

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journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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T1 - ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

AU - Du, X.Y.

AU - Fu, Yong Qing

AU - Tan, S. C.

AU - Luo, Jikui

AU - Flewitt, Andrew

AU - Milne, William

AU - Lee, Dae-Sik

AU - Park, Nae-Man

AU - Park, J.

AU - Choi, Youngjin

AU - Kim, Sang Hyeob

AU - Maeng, Sunglyul

PY - 2008

Y1 - 2008

N2 - Surface acoustic wave(SAW) devices were fabricated on ZnO thin films deposited on Si substrates. Effects of ZnOfilm thickness on the wave mode and resonant frequency of the SAWs have been investigated. Rayleigh and Sezawa waves were detected, and their resonant frequencies decrease with increase in film thickness. The Sezawa wave has much higher acoustic velocity and larger signal amplitude than those of Rayleigh mode wave.Acoustic streaming for mixing has been realized in piezoelectric thin filmSAWs. The Sezawa wave has a much better efficiency in streaming, and thus is very promising for application in microfluidics.

AB - Surface acoustic wave(SAW) devices were fabricated on ZnO thin films deposited on Si substrates. Effects of ZnOfilm thickness on the wave mode and resonant frequency of the SAWs have been investigated. Rayleigh and Sezawa waves were detected, and their resonant frequencies decrease with increase in film thickness. The Sezawa wave has much higher acoustic velocity and larger signal amplitude than those of Rayleigh mode wave.Acoustic streaming for mixing has been realized in piezoelectric thin filmSAWs. The Sezawa wave has a much better efficiency in streaming, and thus is very promising for application in microfluidics.

UR - https://www.scopus.com/pages/publications/51549098834

U2 - 10.1063/1.2970960

DO - 10.1063/1.2970960

M3 - Article

SN - 0003-6951

VL - 93

SP - 094105

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 9

ER -

ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

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