ZnO films for surface acoustic wave microfluidic devices

W. I. Milne, X. Y. Du, Y. Q. Fu, S. C. Tan, J. K. Luo, S. Pisana, S. Maeng, S. H. Kim, Y. J. Choi, D. S. Lee, N. M. Park, J. Park, A. C. Ferrari, A. J. Flewitt

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

Original languageEnglish
Pages1365-1368
Number of pages4
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event14th International Display Workshops, IDW '07 - Sapporo, Japan
Duration: 5 Dec 20075 Dec 2007

Conference

Conference14th International Display Workshops, IDW '07
CountryJapan
CitySapporo
Period5/12/075/12/07

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