SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.
|Number of pages||4|
|Publication status||Published - 1 Dec 2007|
|Event||14th International Display Workshops, IDW '07 - Sapporo, Japan|
Duration: 5 Dec 2007 → 5 Dec 2007
|Conference||14th International Display Workshops, IDW '07|
|Period||5/12/07 → 5/12/07|