ZnO films for surface acoustic wave microfluidic devices

W. I. Milne; X. Y. Du; Y. Q. Fu; S. C. Tan; J. K. Luo; S. Pisana; S. Maeng; S. H. Kim; Y. J. Choi; D. S. Lee; N. M. Park; J. Park; A. C. Ferrari; A. J. Flewitt

ZnO films for surface acoustic wave microfluidic devices

W. I. Milne, X. Y. Du, Y. Q. Fu, S. C. Tan, J. K. Luo, S. Pisana, S. Maeng, S. H. Kim, Y. J. Choi, D. S. Lee, N. M. Park, J. Park, A. C. Ferrari, A. J. Flewitt

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

Original language	English
Pages	1365-1368
Number of pages	4
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	14th International Display Workshops, IDW '07 - Sapporo, Japan Duration: 5 Dec 2007 → 5 Dec 2007

Conference

Conference	14th International Display Workshops, IDW '07
Country/Territory	Japan
City	Sapporo
Period	5/12/07 → 5/12/07

Cite this

@conference{d57e03eb5dfa4e399ac12ec96396ec91,

title = "ZnO films for surface acoustic wave microfluidic devices",

abstract = "SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.",

author = "Milne, {W. I.} and Du, {X. Y.} and Fu, {Y. Q.} and Tan, {S. C.} and Luo, {J. K.} and S. Pisana and S. Maeng and Kim, {S. H.} and Choi, {Y. J.} and Lee, {D. S.} and Park, {N. M.} and J. Park and Ferrari, {A. C.} and Flewitt, {A. J.}",

year = "2007",

month = dec,

day = "1",

language = "English",

pages = "1365--1368",

note = "14th International Display Workshops, IDW '07 ; Conference date: 05-12-2007 Through 05-12-2007",

}

TY - CONF

T1 - ZnO films for surface acoustic wave microfluidic devices

AU - Milne, W. I.

AU - Du, X. Y.

AU - Fu, Y. Q.

AU - Tan, S. C.

AU - Luo, J. K.

AU - Pisana, S.

AU - Maeng, S.

AU - Kim, S. H.

AU - Choi, Y. J.

AU - Lee, D. S.

AU - Park, N. M.

AU - Park, J.

AU - Ferrari, A. C.

AU - Flewitt, A. J.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

AB - SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

UR - http://www.scopus.com/inward/record.url?scp=43349107404&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:43349107404

SP - 1365

EP - 1368

T2 - 14th International Display Workshops, IDW '07

Y2 - 5 December 2007 through 5 December 2007

ER -

ZnO films for surface acoustic wave microfluidic devices

Abstract

Conference

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