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ZnO thin film based flexible temperature sensor

Sameer A. Hasan, Des Gibson, Shigeng Song, Qiang Wu, Wai Pang Ng, Glen McHale, John Dean, Richard Fu

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    15 Citations (Scopus)

    Abstract

    ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.
    Original languageEnglish
    Title of host publication2017 IEEE Sensors
    PublisherIEEE
    Pages1530-1532
    ISBN (Electronic)978-1-5090-1012-7
    ISBN (Print)978-1-5090-1013-4
    DOIs
    Publication statusPublished - 25 Dec 2017

    Publication series

    NameIEEE SENSORS
    ISSN (Print)1930-0395

    Keywords

    • ZnO
    • thin film
    • Flexible SAW device
    • TCF

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