ZnO Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Hua-Feng Peng, J. K. Luo, Yong Qing Fu

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

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Abstract

Progress in ZnO thin films and nanostructures for the acoustic wave microfluidic and sensing applications are reviewed in this chapter. ZnO thin films with good piezoelectric properties possess large electromechanical coupling coefficients and can be fabricated for the surface acoustic wave (SAW) and film-bulk acoustic resonator (FBAR) devices with a good acoustic performance. The SAWs can be excited to mix, stream, pump, eject, and atomize the liquid, and precision sensing can be performed using SAWs and FBARs. Therefore, the ZnO SAW devices are attractive to be integrated into a lab-on-chip system where the SAWs can transport bio-fluids to the desired area, mix the extracted DNA or proteins, and detect the changes of the signals using SAWs or FBARs. The ZnO SAW and FBAR devices in combination with different sensing layers could also be used to successfully detect gas, UV light, and biochemicals with remarkable sensitivities.
Original languageEnglish
Title of host publicationFunctional Materials and Electronics
EditorsJiabao Yi, Sean Li
Place of PublicationOakville
PublisherTaylor & Francis
Pages195-262
Number of pages68
ISBN (Electronic)9781315167367
ISBN (Print)9781771886109
Publication statusPublished - 1 Apr 2018
Externally publishedYes

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